COMPLEXES FOR ALD & CVD APPLICATIONS
Manufacturing products essential to the semiconductor and wafer fab industries
Norquay has aggressively developed its Advanced Precursors manufacturing capabilities to assist the rapidly growing semiconductor market space. Through carefully controlled production under an ISO-9001 certified quality system, Norquay produces consistent and high quality precursors for use in Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD) and related technologies. Specializing in metal containing precursors, products offerings include complexes containing cyclopentadienyl, amide, alkoxide, carbonyl, acetylacetonate ligands, and many other metal-ligand complexes used in ALD and CVD applications.
Ligands for metal-containing precursors
Specializing in metal containing precursors used as catalysts and in ALD and CVD applications, our products offerings include complexes containing the ligands: cyclopentadienyl, amide, alkoxide, carbonyl, acetylacetonate, hydride and many others. Norquay also produces a variety of proprietary ligands for many customers.
- Acetylacetonate (acac)
- Other (proprietary)
Metals for production of custom thin films
From early and late transition metals to alkali and alkaline earth metals; Norquay can produce the structure you need to prepare thin films or other materials.
We routinely produce early transition metal complexes, in particular those based on Titanium (Ti), Zirconium (Zr), or Hafnium (Hf). We also produce late transition metal complexes and can produce a variety carbonyl, hydride and metallocene complexes. We are happy to find a solution for your specific needs.